A Polishing Processes Optimization Method for Ring-Pendulum Double-Sided Polisher

نویسندگان

چکیده

This paper presents an optimization method that aims to mitigate disturbances in the radial-feed system of ring-pendulum double-sided polisher (RDP) during processing. We built a model RDP and developed single-tube robust predictive control enhance disturbance rejection capability system. To constrain states inside terminal constraint set further system’s robustness, we added ε-approximation approach set. Finally, effectiveness proposed for was verified through simulations experiments. These findings demonstrate potential improving performance practical applications. The polish processing results demonstrated substantial improvement accuracy surface shape measurements obtained by applying STRMPC method. Compared MPC method, PV value decreased from 1.49 λ 0.99 PV, indicating convergence rate approximately 9.78%. Additionally, RMS 0.257 0.163 RMS, demonstrating remarkable 35.6% enhancement rate.

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ژورنال

عنوان ژورنال: Applied sciences

سال: 2023

ISSN: ['2076-3417']

DOI: https://doi.org/10.3390/app13137893